GOŁĘBIOWSKI J. Fabrication of the membranes on a silicon base for the sensors with the ultrasonic waves Lamba-type generated by using the interdigital transducers. Arch. Acoust. [Internet]. 2000 Dec. 31 [cited 2026 Apr. 18];25(4):479-86. Available from: http://acoustics.ippt.gov.pl/index.php/aa/article/view/384