Comparative Modelling Studies of 400 MHz ST-X Quartz SAW Delay Lines for Potential Gas Sensing Applications
Abstract
Surface Acoustic Wave (SAW) devices like delay lines, filters, resonators etc., are nowadays extensively used as principal solid state components in many electronic applications and chemical vapour sensors. To bring out the best from these SAW devices, computational design and modelling are resorted too. The present paper proposes the modelling of 400 MHz ST-X Quartz based SAW delay line, by three models namely, Impulse Response Model (IRM), Crossed-field Equivalent Circuit Model (ECM) and Couplingof-Modes (COM) model. MATLAB is employed as a computational tool to model the experimental output of the SAW device. A comparative discussion of the modelled device results is also provided.Keywords:
SAWdelay line, impulse response model, equivalent circuit model, COM model, SAW sensorsReferences
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2. Banupriya R., Venkatesan T., Pandya H.M. (2016), A comparison of surface acoustic wave (SAW) delay line modelling techniques for sensor applications, Journal of Environmental Nanotechnology, 5, 2, 42–47, https://doi.org/10.13074/jent.2016.06.162193
3. Bristol T.W., Jones W.R., Snow P.B., Smith W.R. (1972), Applications of double electrodes in acoustic surface wave device design, [in:] 1972 IEEE Ultrasonics Symposium, pp. 343–345, https://doi.org/10.1109/ULTSYM.1972.196097
4. Bui T.H., Duc T.B., Duc T.C. (2015), Microfluidic injector simulation with FSAW sensor for 3-D integration, IEEE Transactions on Instrumentation and Measurement, 64, 4, 849–856, https://doi.org/10.1109/TIM.2014.2366975
5. Bui T., Morana B., Scholtes T., Duc T.C., Sarro P.M. (2016), A mixing surface acoustic wave device for liquid sensing applications: design, simulation, and analysis, Journal of Applied Physics, 120, 7, 1–10, https://doi.org/10.1063/1.4961214
6. Campbell C.K. (1989), Applications of surface acoustic and shallow bulk acoustic wave devices, Proceedings of the IEEE, 77, 10, 1453–1484, https://doi.org/10.1109/5.40664
7. Campbell C. (1989), Surface acoustic wave devices and their signal processing applications, London: Academic Press.
8. Cross P.S., Schmidt R.V. (1977), Coupled surface-acoustic-wave resonators, Bell System Technical Journal, 56, 8, 1447–1482, https://doi.org/10.1002/j.1538-7305.1977.tb00571.x
9. Filipiak J., Solarz L., Steczko G. (2012), SAW delay line for vibration sensors, Acta Physica Polonica A, 122, 5, 808–813, https://doi.org/10.12693/APhysPolA.122.808
10. Hartmann C.S., Bell D.T., Rosenfeld R.C. (1973), Impulse model design of acoustic surface-wave filters, IEEE Transactions on Microwave Theory and Techniques, 21, 4, 162–175, https://doi.org/10.1109/TMTT.1973.1127967
11. Haus H.A., Huang W. (1991), Coupled-mode theory, Proceedings of the IEEE, 79, 10, 1505–1518, https://doi.org/10.1109/5.104225
12. Hejczyk T., Urbańczyk M., Pustelny T., Jakubik W. (2015), Numerical and experimental analysis of the response of a SAW structure with WO3 layers on action of carbon monoxide, Archives of Acoustics, 40, 1, 19–24, https://doi.org/10.1515/aoa-2015-0003
13. Kannan G.K., Bhalla R., Kapoor J.C., Nimal A.T., Mittal U., Yadava R.D.S. (2004), Detection of landmine signature using SAW-based polymer-coated chemical sensor, Defence Science Journal, 54, 3, 309–315, https://doi.org/10.14429/dsj.54.2044
14. Liu J., Wang W., Li S., Liu M., He S. (2011), Advances in SAW gas sensors based on the condensate-adsorption effect, Sensors, 11, 12, 11871–11884, https://doi.org/10.3390/s111211871
15. Liu X., Cheng S., Liu H., Hu S., Zhang D., Ning H. (2012), A survey on gas sensing technology, Sensors, 12, 12, 9635–9665, https://doi.org/10.3390/s120709635
16. Lu X., Mouthaan K., Soon Y.T. (2014), Wideband bandpass filters with SAW-filter-like selectivity using chip SAW resonators, IEEE Transactions on Microwave Theory and Techniques, 62, 1, 28–36, https://doi.org/10.1109/TMTT.2013.2292041
17. Malik A.F., Burhanudin Z.A., Jeoti V. (2011), A flexible polyimide based SAW delay line for corrosion detection, National Postgraduate Conference – Energy and Sustainability: Exploring the Innovative Minds, NPC 2011, https://doi.org/10.1109/NatPC.2011.6136384
18. Malocha D.A. (1996), Surface acoustic wave design fundamentals, Archives of Acoustics, 21, 4, 387–398, http://acoustics.ippt.gov.pl/index.php/aa/article/view/1008
19. Mathews H. (1977), Surface wave filters design, construction and use. New York: John Wiley & Sons.
20. Mendes J.C., Fernandes M., Mukherjee D., Santos D.M. (2012), Simulation of acoustic wave devices using Matlab, Przeglad Elektrotechniczny, 88, 155–158.
21. Pandya H.M., Sharma M.U., Nimal A.T., Rajesh K.B. (2013), Impulse modelled response of a 300 MHz ST-quartz SAW device for sensor specific applications, Journal of Environmental Nanotechnology, 2, 15–21, https://doi.org/10.13074/jent.2013.02.nciset33
22. Penza M., Cassano G. (2003), Application of principal component analysis and artificial neural networks to recognize the individual VOCs of methanol/2-propanol in a binary mixture by SAW multi-sensor array, Sensors and Actuators B: Chemical, 89, 3, 269–284. https://doi.org/10.1016/S0925-4005%2803%2900002-9
23. Pierce J.R. (1954), Coupling of modes of propagation, Journal of Applied Physics, 25, 2, 179, https://doi.org/10.1063/1.1721599
24. Plessky V., Koskela J. (2000), Coupling-of-modes analysis of SAW devices, International Journal of High Speed Electronics and Systems, 10, 4, 867–947, https://doi.org/10.1142/S0129156400000684
25. Raj V.B., Nimal A.T., Parmar Y., Sharma M.U., Sreenivas K., Gupta V. (2010), Cross-sensitivity and selectivity studies on ZnO surface acoustic wave ammonia sensor, Sensors and Actuators B: Chemical, 147, 2, 517–524, https://doi.org/10.1016/j.snb.2010.03.079
26. Raj V.B., Singh H., Nimal A.T., Sharma M.U., Gupta V. (2013), Oxide thin films (ZnO, TeO2, SnO2, and TiO2) based surface acoustic wave (SAW) E-nose for the detection of chemical warfare agents, Sensors and Actuators B: Chemical, 178, 636–647, https://doi.org/10.1016/j.snb.2012.12.074
27. Raj V.B., Singh H., Nimal A.T., Sharma M.U., Tomar M., Gupta V. (2017), Distinct detection of liquor ammonia by ZnO/SAW sensor: Study of complete sensing mechanism, Sensors and Actuators B: Chemical, 238, 83–90, https://doi.org/10.1016/j.snb.2016.07.040
28. Ricco A.J., Martin S.J. (1991), Thin metal-film characterization and chemical sensors – monitoring electronic conductivity, mass loading and mechanical-properties with surface acoustic-wave devices, Thin Solid Films, 206, 94–101, https://doi.org/10.1016/0040-6090%2891%2990399-I
29. Sharma M.U, Dinesh Kumar D., Koul S.K., Venkatesan T., Pandiyarajan G., Nimal A.T., Kumar P.R, Pandya H.M. (2014), Modelling of SAW Devices for Gas Sensing Applications – A Comparison, Journal of Environmental Nanotechnology, 3, 4, 63–66, doi: 110.13074/jent.2014.12.144110.
30. Singh H., Raj V.B., Kumar J, Mittal U., Mishra M., Nimal A.T., Sharma M.U., Gupta V. (2014), Metal oxide SAW E-nose employing PCA and ANN for the identification of binary mixture of DMMP and methanol, Sensors and Actuators B: Chemical, 200, 147–156, https://doi.org/10.1016/j.snb.2014.04.065
31. Smith W.R. (1974), Experimental distinction between crossed-field and in-line three-port circuit models for interdigital transducers, IEEE Transactions on Microwave Theory and Techniques, 22, 11, 960–964, https://doi.org/10.1109/TMTT.1974.1128393
32. Smith W.R., Gerard H.M., Collins J.H., Reeder T.M., Shaw H.J. (1969), Analysis of interdigital surface wave transducers by use of an equivalent circuit model, IEEE Transactions on Microwave Theory and Techniques, 17, 11, 856–864, https://doi.org/10.1109/TMTT.1969.1127075
33. Smith W.R., Gerard H.M., Jones W.R. (1972), Analysis and design of dispersive interdigital surface-wave transducers, IEEE Transactions on Microwave Theory and Techniques, 20, 7, 458–471, https://doi.org/10.1109/TMTT.1972.1127786
34. Smith W.R., Pedler W.F. (1975), Fundamental- and harmonic-frequency circuit-model analysis of lnterdigital transducers with arbitralry metallization ratios and polarity sequences, IEEE Transactions on Microwave Theory and Techniques, 23, 11, 853–864, https://doi.org/10.1109/TMTT.1975.1128703
35. Staples E.J., Viswanathan S. (2005). Ultrahigh-speed chromatography and virtual chemical sensors for detecting explosives and chemical warfare agents, IEEE Sensors Journal, 5, 4, 622–631, https://doi.org/10.1109/JSEN.2005.850990
36. Tancrell R.H., Holland M.G. (1971), Acoustic surface wave filters, Proceedings of the IEEE, 59, 3, 393–409, https://doi.org/10.1109/PROC.1971.8180
37. Venkatesan T., Banupriya R., Pandiyarajan G., Haresh M. Pandya (2015), Idealized P-Matrix Based Modelling and Computational Analysis of SAW Delay Lines for Improved Performance in Sensors, Journal of Environmental Nanotechnology, 4, 4, 56–61, https://doi.org/10.13074/jent.2015.12.154170
38. Venkatesan T., Pandya H.M. (2013), Surface acoustic wave devices and sensors - a short review on design and modelling by impulse response, Journal of Environmental Nanotechnology, 2, 3, 81–89, https://doi.org/10.13074/jent.2013.09.132034
39. White R.M. (1967), Surface elastic-wave propagation and amplification, IEEE Transactions on Electron Devices, 14, 4, 181–189, https://doi.org/10.1109/T-ED.1967.15926
40. White R.M., Voltmer F.W. (1965), Direct piezoelectric coupling to surface elastic waves, Applied Physics Letters, 7, 12, 314, https://doi.org/10.1063/1.1754276
41. Wilson W.C., Atkinson G.M. (2009a), A comparison of surface acoustic wave modeling methods, Micro Devices to Wireless Systems, 7, 150–150.
42. Wilson W., Atkinson G. (2009b), Comparison of transmission line methods for surface acoustic wave modeling, Sensors & Transducers Journal, 7, 150–159.
43. Wohltjen H. (1984), Mechanism of operation and design considerations for surface acoustic wave device vapour sensors, Sensors and Actuators, 5, 4, 307–325, https://doi.org/10.1016/0250-6874%2884%2985014-3
44. Zhang X., Xu Y., Zhao M., Pan M., Fan Y., Zhang Z. (2006), Modeling and simulation of wireless passive pressure sensors based on surface acoustic wave resonators, 2006 8th international Conference on Signal Processing, https://doi.org/10.1109/ICOSP.2006.346055
2. Banupriya R., Venkatesan T., Pandya H.M. (2016), A comparison of surface acoustic wave (SAW) delay line modelling techniques for sensor applications, Journal of Environmental Nanotechnology, 5, 2, 42–47, https://doi.org/10.13074/jent.2016.06.162193
3. Bristol T.W., Jones W.R., Snow P.B., Smith W.R. (1972), Applications of double electrodes in acoustic surface wave device design, [in:] 1972 IEEE Ultrasonics Symposium, pp. 343–345, https://doi.org/10.1109/ULTSYM.1972.196097
4. Bui T.H., Duc T.B., Duc T.C. (2015), Microfluidic injector simulation with FSAW sensor for 3-D integration, IEEE Transactions on Instrumentation and Measurement, 64, 4, 849–856, https://doi.org/10.1109/TIM.2014.2366975
5. Bui T., Morana B., Scholtes T., Duc T.C., Sarro P.M. (2016), A mixing surface acoustic wave device for liquid sensing applications: design, simulation, and analysis, Journal of Applied Physics, 120, 7, 1–10, https://doi.org/10.1063/1.4961214
6. Campbell C.K. (1989), Applications of surface acoustic and shallow bulk acoustic wave devices, Proceedings of the IEEE, 77, 10, 1453–1484, https://doi.org/10.1109/5.40664
7. Campbell C. (1989), Surface acoustic wave devices and their signal processing applications, London: Academic Press.
8. Cross P.S., Schmidt R.V. (1977), Coupled surface-acoustic-wave resonators, Bell System Technical Journal, 56, 8, 1447–1482, https://doi.org/10.1002/j.1538-7305.1977.tb00571.x
9. Filipiak J., Solarz L., Steczko G. (2012), SAW delay line for vibration sensors, Acta Physica Polonica A, 122, 5, 808–813, https://doi.org/10.12693/APhysPolA.122.808
10. Hartmann C.S., Bell D.T., Rosenfeld R.C. (1973), Impulse model design of acoustic surface-wave filters, IEEE Transactions on Microwave Theory and Techniques, 21, 4, 162–175, https://doi.org/10.1109/TMTT.1973.1127967
11. Haus H.A., Huang W. (1991), Coupled-mode theory, Proceedings of the IEEE, 79, 10, 1505–1518, https://doi.org/10.1109/5.104225
12. Hejczyk T., Urbańczyk M., Pustelny T., Jakubik W. (2015), Numerical and experimental analysis of the response of a SAW structure with WO3 layers on action of carbon monoxide, Archives of Acoustics, 40, 1, 19–24, https://doi.org/10.1515/aoa-2015-0003
13. Kannan G.K., Bhalla R., Kapoor J.C., Nimal A.T., Mittal U., Yadava R.D.S. (2004), Detection of landmine signature using SAW-based polymer-coated chemical sensor, Defence Science Journal, 54, 3, 309–315, https://doi.org/10.14429/dsj.54.2044
14. Liu J., Wang W., Li S., Liu M., He S. (2011), Advances in SAW gas sensors based on the condensate-adsorption effect, Sensors, 11, 12, 11871–11884, https://doi.org/10.3390/s111211871
15. Liu X., Cheng S., Liu H., Hu S., Zhang D., Ning H. (2012), A survey on gas sensing technology, Sensors, 12, 12, 9635–9665, https://doi.org/10.3390/s120709635
16. Lu X., Mouthaan K., Soon Y.T. (2014), Wideband bandpass filters with SAW-filter-like selectivity using chip SAW resonators, IEEE Transactions on Microwave Theory and Techniques, 62, 1, 28–36, https://doi.org/10.1109/TMTT.2013.2292041
17. Malik A.F., Burhanudin Z.A., Jeoti V. (2011), A flexible polyimide based SAW delay line for corrosion detection, National Postgraduate Conference – Energy and Sustainability: Exploring the Innovative Minds, NPC 2011, https://doi.org/10.1109/NatPC.2011.6136384
18. Malocha D.A. (1996), Surface acoustic wave design fundamentals, Archives of Acoustics, 21, 4, 387–398, http://acoustics.ippt.gov.pl/index.php/aa/article/view/1008
19. Mathews H. (1977), Surface wave filters design, construction and use. New York: John Wiley & Sons.
20. Mendes J.C., Fernandes M., Mukherjee D., Santos D.M. (2012), Simulation of acoustic wave devices using Matlab, Przeglad Elektrotechniczny, 88, 155–158.
21. Pandya H.M., Sharma M.U., Nimal A.T., Rajesh K.B. (2013), Impulse modelled response of a 300 MHz ST-quartz SAW device for sensor specific applications, Journal of Environmental Nanotechnology, 2, 15–21, https://doi.org/10.13074/jent.2013.02.nciset33
22. Penza M., Cassano G. (2003), Application of principal component analysis and artificial neural networks to recognize the individual VOCs of methanol/2-propanol in a binary mixture by SAW multi-sensor array, Sensors and Actuators B: Chemical, 89, 3, 269–284. https://doi.org/10.1016/S0925-4005%2803%2900002-9
23. Pierce J.R. (1954), Coupling of modes of propagation, Journal of Applied Physics, 25, 2, 179, https://doi.org/10.1063/1.1721599
24. Plessky V., Koskela J. (2000), Coupling-of-modes analysis of SAW devices, International Journal of High Speed Electronics and Systems, 10, 4, 867–947, https://doi.org/10.1142/S0129156400000684
25. Raj V.B., Nimal A.T., Parmar Y., Sharma M.U., Sreenivas K., Gupta V. (2010), Cross-sensitivity and selectivity studies on ZnO surface acoustic wave ammonia sensor, Sensors and Actuators B: Chemical, 147, 2, 517–524, https://doi.org/10.1016/j.snb.2010.03.079
26. Raj V.B., Singh H., Nimal A.T., Sharma M.U., Gupta V. (2013), Oxide thin films (ZnO, TeO2, SnO2, and TiO2) based surface acoustic wave (SAW) E-nose for the detection of chemical warfare agents, Sensors and Actuators B: Chemical, 178, 636–647, https://doi.org/10.1016/j.snb.2012.12.074
27. Raj V.B., Singh H., Nimal A.T., Sharma M.U., Tomar M., Gupta V. (2017), Distinct detection of liquor ammonia by ZnO/SAW sensor: Study of complete sensing mechanism, Sensors and Actuators B: Chemical, 238, 83–90, https://doi.org/10.1016/j.snb.2016.07.040
28. Ricco A.J., Martin S.J. (1991), Thin metal-film characterization and chemical sensors – monitoring electronic conductivity, mass loading and mechanical-properties with surface acoustic-wave devices, Thin Solid Films, 206, 94–101, https://doi.org/10.1016/0040-6090%2891%2990399-I
29. Sharma M.U, Dinesh Kumar D., Koul S.K., Venkatesan T., Pandiyarajan G., Nimal A.T., Kumar P.R, Pandya H.M. (2014), Modelling of SAW Devices for Gas Sensing Applications – A Comparison, Journal of Environmental Nanotechnology, 3, 4, 63–66, doi: 110.13074/jent.2014.12.144110.
30. Singh H., Raj V.B., Kumar J, Mittal U., Mishra M., Nimal A.T., Sharma M.U., Gupta V. (2014), Metal oxide SAW E-nose employing PCA and ANN for the identification of binary mixture of DMMP and methanol, Sensors and Actuators B: Chemical, 200, 147–156, https://doi.org/10.1016/j.snb.2014.04.065
31. Smith W.R. (1974), Experimental distinction between crossed-field and in-line three-port circuit models for interdigital transducers, IEEE Transactions on Microwave Theory and Techniques, 22, 11, 960–964, https://doi.org/10.1109/TMTT.1974.1128393
32. Smith W.R., Gerard H.M., Collins J.H., Reeder T.M., Shaw H.J. (1969), Analysis of interdigital surface wave transducers by use of an equivalent circuit model, IEEE Transactions on Microwave Theory and Techniques, 17, 11, 856–864, https://doi.org/10.1109/TMTT.1969.1127075
33. Smith W.R., Gerard H.M., Jones W.R. (1972), Analysis and design of dispersive interdigital surface-wave transducers, IEEE Transactions on Microwave Theory and Techniques, 20, 7, 458–471, https://doi.org/10.1109/TMTT.1972.1127786
34. Smith W.R., Pedler W.F. (1975), Fundamental- and harmonic-frequency circuit-model analysis of lnterdigital transducers with arbitralry metallization ratios and polarity sequences, IEEE Transactions on Microwave Theory and Techniques, 23, 11, 853–864, https://doi.org/10.1109/TMTT.1975.1128703
35. Staples E.J., Viswanathan S. (2005). Ultrahigh-speed chromatography and virtual chemical sensors for detecting explosives and chemical warfare agents, IEEE Sensors Journal, 5, 4, 622–631, https://doi.org/10.1109/JSEN.2005.850990
36. Tancrell R.H., Holland M.G. (1971), Acoustic surface wave filters, Proceedings of the IEEE, 59, 3, 393–409, https://doi.org/10.1109/PROC.1971.8180
37. Venkatesan T., Banupriya R., Pandiyarajan G., Haresh M. Pandya (2015), Idealized P-Matrix Based Modelling and Computational Analysis of SAW Delay Lines for Improved Performance in Sensors, Journal of Environmental Nanotechnology, 4, 4, 56–61, https://doi.org/10.13074/jent.2015.12.154170
38. Venkatesan T., Pandya H.M. (2013), Surface acoustic wave devices and sensors - a short review on design and modelling by impulse response, Journal of Environmental Nanotechnology, 2, 3, 81–89, https://doi.org/10.13074/jent.2013.09.132034
39. White R.M. (1967), Surface elastic-wave propagation and amplification, IEEE Transactions on Electron Devices, 14, 4, 181–189, https://doi.org/10.1109/T-ED.1967.15926
40. White R.M., Voltmer F.W. (1965), Direct piezoelectric coupling to surface elastic waves, Applied Physics Letters, 7, 12, 314, https://doi.org/10.1063/1.1754276
41. Wilson W.C., Atkinson G.M. (2009a), A comparison of surface acoustic wave modeling methods, Micro Devices to Wireless Systems, 7, 150–150.
42. Wilson W., Atkinson G. (2009b), Comparison of transmission line methods for surface acoustic wave modeling, Sensors & Transducers Journal, 7, 150–159.
43. Wohltjen H. (1984), Mechanism of operation and design considerations for surface acoustic wave device vapour sensors, Sensors and Actuators, 5, 4, 307–325, https://doi.org/10.1016/0250-6874%2884%2985014-3
44. Zhang X., Xu Y., Zhao M., Pan M., Fan Y., Zhang Z. (2006), Modeling and simulation of wireless passive pressure sensors based on surface acoustic wave resonators, 2006 8th international Conference on Signal Processing, https://doi.org/10.1109/ICOSP.2006.346055
