Archives of Acoustics, 43, 3, pp. 357–367, 2018
10.24425/123908

Review of Surface Acoustic Wave Sensors for the Detection and Identification of Toxic Environmental Gases/Vapours

Gowdhaman PANNEERSELVAM
Chikkanna Government Arts College
India

Venkatesan THIRUMAL
Chikkanna Government Arts College
India

Haresh M. PANDYA
Chikkanna Government Arts College
India

Detection and identification of toxic environmental gases have assumed paramount importance precisely in the defense, industrial and civilian security sector. Numerous methods have been developed for the sensing of toxic gases in the environment ever since surface acoustic wave (SAW) technology came into existence. Such SAW sensors called electronic nose (E-Nose) sensor use the frequency response of a delay line/resonator. SAW device is focused and given importance. The selective coating between input and output interdigital transducers (IDTs) in the SAW device is responsible for corresponding changes in operating frequency of the device for a specific gas/vapour absorbed from the environment. A suitable combination of well-designed SAW delay lines with selective coatings not only help to improve sensor sensitivity and selectivity but also leads to the minimization of false frequency alarms in the E-Nose sensor. This article presents a comprehensive review of design, development, simulation and modelling of a SAW sensor for potential sensing of toxic environmental gases.
Keywords: toxic gases; SAW sensors; E-Nose; gas sensors; selective coating
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Copyright © Polish Academy of Sciences & Institute of Fundamental Technological Research (IPPT PAN).

References

ABRAHAM MH. (1995), Method for Estimating Polymer-Coated Acoustic Wave Vapor Sensor Responses, Anal Chem 67,:2162–2169.

AFZAL A., CIOFFI N., SABBATINI L., TORSI L. (2012), NO x sensors based on semiconducting metal oxide nanostructures: Progress and perspectives, Sensors Actuators, B Chem 171–172,:25–42.

AFZAL A., IQBAL N., MUJAHID A., SCHIRHAGL R. (2013), Advanced vapor recognition materials for selective and fast responsive surface acoustic wave sensors: A review, Anal Chim Acta 787,:36–49.

ALIZADEH T., ZEYNALI S. (2008), Electronic nose based on the polymer coated SAW sensors array for the warfare agent simulants classification, Sensors Actuators, B Chem 129,:412–423.

BALCERZAK A., ALEKSIEJUK M., ZHAVNERKO G., AGABEKOV V. (2010), Sensing properties of two-component Langmuir-Blodgett layer and its porous derivative in SAW sensor for vapors of methanol and ethanol, Thin Solid Films 518,:3402–3406.

BANU PRIYA R., VENKATESAN T., PANDIYARAJAN G., HARESH M P. (2014), SAW Devices - A Comprehensive Review, J Environ Nanotechnol 3,:106–115.

BARSAN N., KOZIEJ D., WEIMAR U. (2007), Metal oxide-based gas sensor research: How to?, Sensors Actuators, B Chem 121,:18–35.

BHASKER RAJ V., NIMAL AT., PARMAR Y., ET AL. (2012), Investigations on the origin of mass and elastic loading in the time varying distinct response of ZnO SAW ammonia sensor, Sensors Actuators, B Chem 166–167,:576–585.

BHASKER RAJ V., SINGH H., NIMAL AT., ET AL. (2013), Effect of metal oxide sensing layers on the distinct detection of ammonia using surface acoustic wave (SAW) sensors, Sensors Actuators, B Chem 187,:563–573.

CHANG P., SHIH JS. (1998), Preparation and application of cryptand-coated piezoelectric crystal gas-chromatographic detector, Anal Chim Acta 360,:61–68.

DEVKOTA J., OHODNICKI P., GREVE D. (2017), SAW Sensors for Chemical Vapors and Gases, Sensors 17,:801.

DEWAN N., HARIDAS D., SHANDILYA S., ET AL. (2008), Influence of temperature stability on sensing properties of SAW NO x sensor, Indian J Eng Mater Sci 15,:352–354.

DICKERT FL., FORTH P., BULST W-E., ET AL. (1998), SAW devices-sensitivity enhancement in going from 80 MHz to 1 GHz, Sensors Actuators B Chem 46,:120–125.

DU X., YING Z., JIANG Y., ET AL. (2008), Synthesis and evaluation of a new polysiloxane as SAW sensor coatings for DMMP detection, Sensors Actuators, B Chem 134,:409–413.

EL GOWINI MM., MOUSSA WA. (2010), A finite element model of a MEMS-based surface acoustic wave hydrogen sensor., Sensors (Basel) 10,:1232–50.

FU C., KE Y., LI M., ET AL. (2017), Design and Implementation of 2.45 GHz Passive SAW Temperature Sensors with BPSK Coded RFID Configuration, Sensors 17,:1849.

HAO HC., TANG KT., KU PH., ET AL. (2010), Development of a portable electronic nose based on chemical surface acoustic wave array with multiplexed oscillator and readout electronics, Sensors Actuators, B Chem 146,:545–553.

HARESH M P., SHARMA MU., NIMAL AT., RAJESH KB. (2013), Impulse Modelled Response of a 300 MHz ST-Quartz SAW Device For Sensor Specific Applications, J Environ Nanotechnol 2,:15–21.

HARIDAS D., CHOWDHURI A., SREENIVAS K., GUPTA V. (2010), Fabrication of SnO2 thin film based electronic nose for industrial environment,. In: 2010 IEEE Sensors Applications Symposium (SAS). IEEE, pp 212–215

HARMER GP., MARQUIS BT. (2004), Detection of chemical warfare agents in the presence of interferents, Proc IEEE Sensors, 2004 1506–1509.

HINSON-SMITH V. (2005), The new era of SAW devices, 0–2.

HO CK., ROBINSON A., MILLER DR., DAVIS MJ. (2005), Overview of Sensors and Needs for Environmental Monitoring, Sensors 5,:4–37.

ISLAM T., NIMAL AT., MITTAL U., SHARMA MU. (2015), Sensors and Actuators B : Chemical A micro interdigitated thin film metal oxide capacitive sensor for measuring moisture in the range of 175 – 625 ppm, Sensors Actuators B Chem 221,:357–364.

JAKUBIK W., POWROZNIK P., WROTNIAK J., KRZYWIECKI M. (2016), Theoretical analysis of acoustoelectrical sensitivity in SAW gas sensors with single and bi-layer structures, Sensors Actuators, B Chem 236,:1069–1074.

JAKUBIK WP. (2011), Surface acoustic wave-based gas sensors, Thin Solid Films 520,:986–993.

JHA S., YADAVA R. (2010), Development of Surface Acoustic Wave Electronic Nose, Def Sci J 60,:364–376.

JHA SK., HAYASHI K., YADAVA RDS. (2014), Neural, fuzzy and neuro-fuzzy approach for concentration estimation of volatile organic compounds by surface acoustic wave sensor array, Measurement 55,:186–195.

JOO BS., HUH JS., LEE DD. (2007), Fabrication of polymer SAW sensor array to classify chemical warfare agents, Sensors Actuators, B Chem 121,:47–53.

KANNAN GK., NIMAL AT., MITTAL U., ET AL. (2004), Adsorption studies of carbowax coated surface acoustic wave (SAW) sensor for 2,4-dinitro toluene (DNT) vapour detection, Sensors Actuators, B Chem 101,:328–334.

KHANEJA M., MITTAL U. (2008), Design and modelling of a two-port surface acoustic wave resonator using coupling-of-modes theory, Def Sci J 58,:372–376.

KNAUER U., MACHUI J., RUPLPEL CCW., MEMBER S. (1997), Design, Fabrication, and Application of GHz SAW Devices, IEEE Microw Theory Tech Soc 1821–1824.

KUMAR AKS., PARUCH P., TRISCONE JM., ET AL. (2004), High-frequency surface acoustic wave device based on thin-film piezoelectric interdigital transducers, Appl Phys Lett 85,:1757–1759.

LI B., YASSINE O., KOSEL J. (2015), A Surface Acoustic Wave Passive and Wireless Sensor for Magnetic Fields, Temperature, and Humidity, IEEE Sens J 15,:453–462.

LIM C., WANG W., YANG S., LEE K. (2011), Development of SAW-based multi-gas sensor for simultaneous detection of CO2 and NO2, Sensors Actuators, B Chem 154,:9–16.

LUO W., FU Q., ZHOU D., ET AL. (2013), A surface acoustic wave H2S gas sensor employing nanocrystalline SnO2 thin film, Sensors Actuators, B Chem 176,:746–752.

M. PANDYA H. (2010), Design and Modelling of Surface Acoustic Wave (SAW) Devices and Sensors,. Bharathiar University

MATATAGUI D., FERNÁNDEZ MJ., FONTECHA J., ET AL. (2011), Discrimination and classification of chemical warfare agent simulants using a Love-wave sensor array, Procedia Eng 25,:23–26.

MATATAGUI D., FONTECHA J., FERNÁNDEZ MJ., ET AL. (2012), Comparative Evaluation between Two Acoustic Immunosensors: Love-wave and QCM, and Systems of Measurement: Dynamic and Static, Procedia Eng 47,:174–177.

MATATAGUI D., KOLOKOLTSEV OV., QURESHI N., ET AL. (2015), A novel ultra-high frequency humidity sensor based on a magnetostatic spin wave oscillator, Sensors Actuators B Chem 210,:297–301.

MATATAGUI D., MARTÍ J., FERNÁNDEZ MJ., ET AL. (2011), Chemical warfare agents simulants detection with an optimized SAW sensor array, Sensors Actuators, B Chem 154,:199–205.

MATATAGUI D., MARTÍ J., FERNÁNDEZ MJ., ET AL. (2009), Optimized design of a SAW sensor array for chemical warfare agents simulants detection, Procedia Chem 1,:232–235.

MCGILL RA., NGUYEN VK., CHUNG R., ET AL. (2000), `NRL-SAWRHINO’: A nose for toxic gases, Sensors Actuators, B Chem 65,:10–13.

MITTAL U., ISLAM T., NIMAL AT., SHARMA MU. (2015), A Novel Sol–Gel γ -Al2O3 Thin-Film-Based Rapid SAW Humidity Sensor, IEEE Trans Electron Devices 62,:4242–4250.

MOORE DS. (2004), Instrumentation for trace detection of high explosives, Rev Sci Instrum 75,:2499–2512.

MORGAN DP. (1998), History of SAW devices, 1998 IEEE Int Freq Control Symp 439–460.

MSEDDI S., TEKELI F., NJEH A., ET AL. (2016), Effect of initial stress on the propagation behavior of SAW in a layered piezoelectric structure of ZnO/Al2O3, Mech Res Commun 76,:24–31.

NIMAL AT., MITTAL U., SINGH M., ET AL. (2009), Development of handheld SAW vapor sensors for explosives and CW agents, Sensors Actuators, B Chem 135,:399–410.

NIMAL AT., SINGH M., MITTAL U., YADAVA RDS. (2006), A comparative analysis of one-port Colpitt and two-port Pierce SAW oscillators for DMMP vapor sensing, Sensors Actuators, B Chem 114,:316–325.

PLESSKI V. (2005), Saw device with suspended electrodes,

PRIYA RB., VENKATESAN T., PANDYA HM. (2016), A Comparison of Surface Acoustic Wave ( SAW ) Delay Line Modelling Techniques for Sensor Applications, J Environ Nanotechnol 5,:42–47.

RAJ VB. (2012), Fabrication of Metal Oxide Thin Films based Surface Acoustic Wave ( SAW ) Sensors for the Detection of Toxic Vapors / Gases,. University of Delhi

RAJ VB., NIMAL AT., PARMAR Y., ET AL. (2010), Cross-sensitivity and selectivity studies on ZnO surface acoustic wave ammonia sensor, Sensors Actuators, B Chem 147,:517–524.

RAJ VB., NIMAL AT., TOMAR M., ET AL. (2015), Novel scheme to improve SnO2/SAW sensor performance for NO2 gas by detuning the sensor oscillator frequency, Sensors Actuators B Chem 220,:154–161.

RAJ VB., SINGH H., NIMAL A T., ET AL. (2013), Oxide thin films (ZnO, TeO2, SnO2, and TiO2) based surface acoustic wave (SAW) E-nose for the detection of chemical warfare agents, Sensors Actuators, B Chem 178,:636–647.

RAJ VB., SINGH H., NIMAL AT., ET AL. (2017), Distinct detection of liquor ammonia by ZnO/SAW sensor: Study of complete sensing mechanism, Sensors Actuators, B Chem 238,:83–90.

RAJ VB., SINGH H., NIMAL AT., ET AL. (2012), Utilization of Mass and Elastic Loading in Oxide Materials Based SAW Devices for the Detection of Mustard Gas Simulant, Adv Mater Res 488–489,:1558–1562.

RAJ VB., SINGH H., NIMAL AT., ET AL. (2015), Origin and role of elasticity in the enhanced DMMP detection by ZnO/SAW sensor, Sensors Actuators, B Chem 207,:375–382.

ROCK F., BARSAN N., WEIMAR U., ET AL. (2008), Electronic nose: Current status and future trends, Chem Rev 108,:705–725.

RODRÍGUEZ-MADRID JG., IRIARTE GF., WILLIAMS OA., CALLE F. (2013), High precision pressure sensors based on SAW devices in the GHz range, Sensors Actuators A Phys 189,:364–369.

SFEROPOULOS R. (2009), A Review of Chemical Warfare Agent ( CWA ) Detector Technologies and Commercial-Off-The-Shelf Items, Aust Gov Dep Def 98.

SHARMA MU., KUMAR D., KOUL SK., ET AL. (2014), Modelling of SAW Devices for Gas Sensing Applications – A Comparison, J Environ Nanotechnol 3,:63–66.

SINGH H., RAJ VB., KUMAR J., ET AL. (2016), SAW mono sensor for identification of harmful vapors using PCA and ANN, Process Saf Environ Prot 102,:577–588.

SINGH H., RAJ VB., KUMAR J., ET AL. (2014), Metal oxide SAW E-nose employing PCA and ANN for the identification of binary mixture of DMMP and methanol, Sensors Actuators, B Chem 200,:147–156.

TASALTIN C., EBEOGLU MA., OZTURK ZZ. (2012), Acoustoelectric effect on the responses of saw sensors coated with electrospun znO nanostructured thin film, Sensors (Switzerland) 12,:12006–12015.

TIGLI O., ZAGHLOUL ME. (2008), Design, modeling, and characterization of a novel circular surface acoustic wave device, IEEE Sens J 8,:1807–1815.

VENKATESAN T., PANDYA HM. (2013), Surface Acoustic Wave Devices and Sensors - A Short Review On Design and Modelling by Impulse Response, J Environ Nanotechnol 2,:81–90.

VERMA P., YADAVA RDS. (2015), Polymer selection for SAW sensor array based electronic noses by fuzzy c-means clustering of partition coefficients: Model studies on detection of freshness and spoilage of milk and fish, Sensors Actuators B Chem 209,:751–769.

WETCHAKUN K., SAMERJAI T., TAMAEKONG N., ET AL. (2011), Semiconducting metal oxides as sensors for environmentally hazardous gases, Sensors Actuators, B Chem 160,:580–591.

WILSON W., ATKINSON G. (2007), Rapid SAW Sensor Development Tools, NASA Tech reports 1–7.

WILSON WC., ATKINSON GM. (2007), Frequency Domain Modeling of SAW Devices, 1–5.

WOHLTJEN H., DESSY R. (1979), Surface acoustic wave probe for chemical analysis. I. Introduction and instrument description, Anal Chem 51,:1458–1464.




DOI: 10.24425/123908